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COVERAGE OF ELECTROCHEMICAL TRANSDUCERS MADE IN Si- TECHNOLOGY WITH ENZYME MEMBRANES
Hintsche, Rainer Scheller, Frieder
Hintsche, Rainer
Scheller, Frieder
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Issue Date
1989
Submitted date
2023-12-06
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Abstract
Some methods to cover electrochemical sensors based on silicon technology with enzyme membranes using different polymer systems are known. The main requirements of enzyme membranes at electrochemical sensor elements based on silicon technology, such as ion sensitive field effect transistors (ISFETs) and thin film noble metal electrodes (TFMEs), are good adhesion at the sensor surface and minimal diffusion resistance for substrates and products. Furthermore the amount of enzyme molecules immobilized at the active surface of the sensor element influences the functional Parameters of the biosensor, e.g. lifetime, sensitivity, linearity, and response time, which should be in the same range as for the enzyme membranes of first generation biosensors. In this paper we describe new covering procedures that have been studied in order to find out technologies compatible to microelectronic Production technology used for the fabrication of TFMEs (FIG 1) and multigate ISFETs.
Citation
Biosensors : applications in medicine, environmental protection and process control, 155 - 158
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Type
Book chapter
conference paper
conference paper
Language
en
Description
Series/Report no.
GBF monographs ; Volume 13
ISSN
0930-4320
EISSN
ISBN
0895739550
3527280324
3527280324
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Attribution-NonCommercial-ShareAlike 4.0 International