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ELECTROCHEMICAL SENSORS FABRICATED BY MICROELECTRONIC FABRICATION PROCESSES FOR THE DEVELOPMENT OF BIOSENSORS
Liu, Chung-Chiun Neuman, Michael R. Makovos, Edward A.
Liu, Chung-Chiun
Neuman, Michael R.
Makovos, Edward A.
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Issue Date
1987
Submitted date
2023-08-30
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Abstract
Many electrochemical sensors have found direct applications as biomedical sensors, such as blood gas e.g. PO), pH and PCO» sensors. In addition, electrochemical sensors are an integral part of other biomedical sensors; a typical example being the polarographic oxygen sensor based glucose sensor. Microelectronic fabrication technology has been demonstrated to be a good means to produce low-cost, reproducible, small scale electronic devices. These technologies, such as thick and thin film deposition, photolithographic reduction, and chemical and plasma etching, permit well-delineated patterning of metallic, insulating and semiconducting surface layers. Consequently, highly uniform, geometrically welldefined and identical metallic or other surface areas can be produced. This high degree of reproducibility of the geometry of the electrode surface area is unique and important in sensor development. The attractive features of this fabrication technology are well-suited to the development of various electrochemical sensorbased biosensors, particularly for amperometric electrochemical sensor-based devices. Microelectronic fabrication techniques have the capacity to produce small size, relatively low-cost biomedical sensors. Furthermore, arrays of identical or different electrochemical sensors can be produced with relative ease, enhancing the reliability, repeatability and versatility of the sensors. New sensor operational methodology may also be exploited. Examples of the fabricated sensors will be used to illustrate the potential advantages of this approach. The present limitations of this fabrication technique will also be assessed.
Citation
Biosensors International Workshop 1987, 173 - 178
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Type
Book chapter
conference paper
conference paper
Language
en
Description
Series/Report no.
GBF Monographs, Volume 10
ISSN
0930-4320
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ISBN
0-89573-683-7
3-527-26801-4
3-527-26801-4
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Attribution-NonCommercial-ShareAlike 4.0 International