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ENZYME IMMOBILIZED MEMBRANE PATTERNING METHOD FOR SOS/ISFET BIOSENSORS
Nakamoto, S. Kimura, J. Kuriyama, T.
Nakamoto, S.
Kimura, J.
Kuriyama, T.
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Issue Date
1987
Submitted date
2023-09-06
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Abstract
A new method for preparing enzyme immobilized membranes of miniature biosensors has been developed and demonstrated by fabricating a glucose sensor, based on the ion sensitive field effect transistor (ISFET) . The enzyme solution, containing glutaraldehyde, was spin coated onto a wafer covered with a patterned photoresist. The resulting enzyme immobilized membrane was lifted off by ultrasonic vibration in acetone, except for the membranes on the pH-sensitive regions of the transistors. The deposited membranes were precisely patterned and hardly peeled off. The method is compatible with the IC processes and applicable to biosensor mass-production.
Citation
Biosensors International Workshop 1987, 289 - 290
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Type
Book chapter
conference paper
conference paper
Language
en
Description
Series/Report no.
GBF Monographs, Volume 10
ISSN
0930-4320
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ISBN
0-89573-683-7
3-527-26801-4
3-527-26801-4
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Attribution-NonCommercial-ShareAlike 4.0 International