ENZYME IMMOBILIZED MEMBRANE PATTERNING METHOD FOR SOS/ISFET BIOSENSORS

Abstract

A new method for preparing enzyme immobilized membranes of miniature biosensors has been developed and demonstrated by fabricating a glucose sensor, based on the ion sensitive field effect transistor (ISFET) . The enzyme solution, containing glutaraldehyde, was spin coated onto a wafer covered with a patterned photoresist. The resulting enzyme immobilized membrane was lifted off by ultrasonic vibration in acetone, except for the membranes on the pH-sensitive regions of the transistors. The deposited membranes were precisely patterned and hardly peeled off. The method is compatible with the IC processes and applicable to biosensor mass-production.