AN ION SENSITIVE FIELD EFFECT TRANSISTOR FOR BIOSENSOR APPLICATION

Abstract

As on the one handa field effect transistor (FET) is a widespreadelectronic device for a potentiometric measuring of electrical phenomena, on the other hand change of dipole moments or accumulation of net charge occur as a consequence of a biological reaction, the combination of an ion sensitive field effect transistor (ISFET) with a biological layer, the so-called Bio-FET, is an excellent device for measuring concentrations of biological substances in a sample solution. The ISFET,fabricated by the semiconductor technology with low fabrication costs, offers the possibility of integrating signal processing together with the FET-sensor. Principle of function, layout of the sensor chip, integrated multi sensor array, experimental results are the topics treatedin this paper.