Thin and Thick Film Chemical Sensors

Abstract

Chemical sensors with solid ion-conductors or mixed ion- and electron-conductors have been prepared by the thin film ICB (lon Cluster Beam Evaporation) and by the thick film screen printing methods. By the ICB method, the sensor material TiO, was deposited on sapphire and quartz substrates. The deposited film of about 1 um thickness has oriented texture. By the screen printing method, solid ion-conductors Nasicon (Nay.xZroSi,P3-,Oj2) and YSZ (yttria stabilized zirconia) have been deposited onto a-alumina substrate. An all-thick film hydrogen sensor based on Nasicon containing sodium tungsten bronze (Na,WO.) reference electrode and porous platinum working electrode was produced by the screen printing method. The range of this sensorlies between 100 ppm and 100% hydrogen in air.