DESIGN, FABRICATION AND MEASUREMENTOFA FET TRANSDUCER FOR CHEMICAL SENSORS

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Authors
Falter, T.
Mikolajick, T.
Ryssel, H.
Issue Date
1992
Submitted date
2024-05-08

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Abstract
A FET Transducer for chemical sensors with the focus on experimental work was designed and fabricated using a standard NMOS, aluminum gate fabrication process. The time consuming packaging procedure is avoided by using a teflon sample holder, which allows to contact the device via needle probes. First measurements were made to proof the suitability of the designed transistors for further research work.
Citation
Biosensors : fundamentals, technologies and applications, 345 - 348
Affiliation
Fraunhofer Arbeitsgruppe für Integrierte Schaltungen (AIS) Artilleriestrasse 12, 8520 Erlangen, Germany; Universität Erlangen-Nürnberg, Lehrstuhl für Elektronische Bauelemente Artilleriestrasse 12, 8520 Erlangen, Germany
Publisher
GBF Gesellschaft für Biotechnologische Forschung mbH, Braunschweig
Journal
Biosensors : fundamentals, technologies and applications, 1992
URI
http://hdl.handle.net/10033/623815
Type
Book chapter
conference paper
Language
en
Series/Report no.
GBF monographs ; Volume 17
ISSN
0930-4320
ISBN
1560812206
3527284370
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Attribution-NonCommercial-ShareAlike 4.0 International
Except where otherwise noted, this item's license is described as Attribution-NonCommercial-ShareAlike 4.0 International