Microbiosensors Prepared by Micromachining

Abstract

This paper introduces the application of micromachining techniques to biochemical sensing. The micromachined biosensors have small size, low production cost, and good reproducibility. Therefore,it is suitable for in vivo measurement, microanalysis and disposable use. We developed two types of micromachined amperometric biosensor, one is based on a micro oxygenelectrode, and another is an integrated micro electrochemical cell whichconsists of micro electrodes and small sample chamber. We made a CO, sensor, L-lysine sensor and hypoxanthine sensor using the micro oxygen electrode, and a glucose sensor using the integrated micro electrochemical cell.